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Soojin Park,
Dong Hyun Lee,
Ji Xu,
Bokyung Kim,
Sung Woo Hong,
Unyong Jeong,
Ting Xu,
Thomas P. Russell
Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will
revolutionize the microelectronic and storage industries. We used faceted surfaces of commercially
available sapphire wafers to guide the self-assembly of block copolymer microdomains into
oriented arrays with quasi–long-range crystalline order over arbitrarily large wafer surfaces.
Ordered arrays of cylindrical microdomains 3 nanometers in diameter, with areal densities in
excess of 10 terabits per square inch, were produced. The sawtoothed substrate topography
provides directional guidance to the self-assembly of the block copolymer, which is tolerant of
surface defects, such as dislocations. The lateral ordering and lattice orientation …